Anneal Activation Fraction Calculator
Compute the fraction of dopant activated by an anneal from a first-order activation rate and anneal duration. Fraction = 1 - exp(-rate × time).
Description
Calculate dopant activation fraction from a first-order activation rate constant and anneal duration.
Compute the fraction of dopant activated by an anneal from a first-order activation rate and anneal duration. Fraction = 1 - exp(-rate × time).
When to use Anneal Activation Fraction Calculator
- Calculate dopant activation fraction from a first-order activation rate constant and anneal duration.
- Compare fabrication or device scenarios while holding coefficients and unit conventions constant.
- Check a hand calculation before moving to a higher-fidelity process, circuit, or TCAD model.
How the calculation works
The rate is an effective constant: doubling time does not double activation as the result approaches one asymptotically.
activated fraction = 1 − exp(−rate · time) Interpreting the result
The rate is an effective constant: doubling time does not double activation as the result approaches one asymptotically.
Assumptions and limitations
- Real activation and deactivation depend on dopant species, dose, temperature history, clustering, interfaces, and solid solubility.
- Use parameters measured for the same material, geometry, temperature, and operating regime whenever the result informs engineering work.