Epitaxy Growth Rate Calculator
Divide the grown epitaxial layer thickness (final minus initial) by the deposition time to get the average epitaxy growth rate.
Description
Calculate average epitaxial layer growth rate in micrometers per minute from grown thickness and deposition time.
Epitaxy growth rate summarizes crystalline layer thickness gained per minute. The micrometer-per-minute output is convenient for comparatively thick epitaxial layers and should be interpreted as an average over the complete run.
When to use Epitaxy Growth Rate Calculator
- Convert an epitaxial thickness measurement into µm/min
- Compare average layer growth across reactor runs
- Estimate an initial recipe duration for a similar target layer
How the calculation works
The calculator divides grown epitaxial thickness by total growth time. The thickness input represents the new epitaxial layer, not the substrate thickness.
average epitaxy growth rate = grown layer thickness / growth time Interpreting the result
The average includes any ramp, stabilization, or incubation time included in the entered duration. Clarify the time window before comparing rates from different sources.
Assumptions and limitations
- Growth time must be positive; the grown layer thickness may be zero.
- The calculation does not test crystallinity, composition, strain, defects, interface abruptness, or thickness uniformity.
- Do not assume a rate transfers between different precursors, orientations, reactor conditions, or loading.