MEMS Resonant Frequency

Find the undamped natural frequency of a single-degree-of-freedom MEMS proof mass from effective stiffness and effective mass.

Description

Find the undamped natural frequency of a single-degree-of-freedom MEMS proof mass from effective stiffness and effective mass.

MEMS Resonant Frequency: Find the undamped natural frequency of a single-degree-of-freedom MEMS proof mass from effective stiffness and effective mass.

When to use MEMS Resonant Frequency

Use this electronics calculation for a first-pass component, converter, signal, motor, or sensor estimate when the stated operating conditions and units match the device data.

Effective stiffness (N/m)
Required number input.
Effective proof mass (kg)
Required number input.

How MEMS Resonant Frequency works

Find the undamped natural frequency of a single-degree-of-freedom MEMS proof mass from effective stiffness and effective mass. The tool evaluates the supplied inputs together and returns the named outputs below; it does not infer omitted operating conditions or change the units shown.1

Undamped natural frequency (Hz)
The resulting undamped natural frequency returned as a number.

Limitations and assumptions

  • MEMS resonance, scale factor, and Q depend on structure, packaging pressure, temperature, drive amplitude, damping, fabrication spread, mounting stress, and readout electronics. Lumped models may not capture mode coupling or nonlinear operation.
  • Use finite inputs in the displayed units and preserve more precision than the final presentation requires. Independently verify safety-critical, financial, compliance, or production decisions.

Alternative or Complementary approaches

Check the result against the current datasheet and worst-case operating corners, then verify the circuit or measurement with simulation and bench testing where failure matters.

References

  1. MEMS — Wikipedia contributors

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